AGV-SPO High-Performance Single Pivot-Point Laser Scan Heads

AGV-SPO

Model：AGV-SPO
Description：

Aerotech’s AGV-SPO single pivot-point galvanometer scanner provides an alternative to traditional two-mirror galvo scanners. Derived from the popular AGV-HPO scanner, the AGV-SPO enables a larger field of view and reduced spot distortion for critical laser micromachining applications.

Datasheets

Price(USD)：$0

Content Specifications

Design Features
● Larger field of view than traditional 2D scanners simplifies the processing of larger parts
● Minimal spot distortion over the entire field of view minimizes processing variation for the highest quality laser-processed parts
● Air and water cooling options provide thermal stability and improve long-term accuracy
● Many choices of mirror surface treatments for a variety of laser wavelengths

Large Field of View with Minimal Spot Distortion
A unique optical design effectively controls the beam entrance pupil to be coincident for the X and Y scanner motion, increasing the effective numerical aperture of the scanner system. This design directly enables a larger field of view for a given focal length and reduces spot distortion over the entire working area. These advantages mean that the AGV-SPO is able to process larger parts faster and with greater consistency.

Design Configurations
The AGV-SPO is available with a selection of optical coatings and focusing optics to support a variety of commonly-used laser wavelengths and focal lengths. To support other needs, Aerotech can supply the AGV-SPO with customized optics and optical mounting features upon request. The AGV-SPO can be configured with air-cooled mirrors, water-cooled motors, or both. These active cooling features help to preserve working-plane accuracy in the presence of thermal disturbances caused by the laser as well as aggressive motion profiles.

Advanced Programming Features
The AGV-SPO utilizes all of Aerotech’s advanced motion and Position Synchronized Output (PSO) capabilities that have been developed for laser processing applications with traditional galvos and servo stages. Contouring functions such as Acceleration Limiting can be used to automatically reduce speeds in tight corners or small radii to minimize overshoot. The laser can be triggered based on the position feedback of the mirrors with PSO to ensure consistent spot overlap as the scanner changes speed.

Aerotech’s Infinite Field of View (IFOV) function seamlessly combines servo and scanner motion to extend the marking capability of the scanner across the entire travel range of the servo stages, eliminating stitching errors that can occur in a more traditional move-expose-repeat process.

	AGV14SPO
OPTICAL PERFORMANCE
Beam Aperture	14 mm
Maximum Scan Angle	±20°
Beam Displacement	35 mm
Dither (Min. Incremental Motion)⁽²⁾	0.3 µrad RMS
Accuracy	50 µrad pk-pk
Repeatability⁽³⁾	0.6 µrad RMS
Gain Error	0.05 mrad
Non-Linearity	0.01%
DYNAMIC PERFORMANCE
Tracking Error	0 µsec
Peak Acceleration⁽⁴⁾⁽⁵⁾	60,000 m/s²
Continuous Acceleration⁽⁴⁾⁽⁶⁾	20,000 m/s²
Positioning Speed⁽⁴⁾	50 m/s
Processing Speed^(4)(7)(8)	5 m/s
Jump & Settle Time, 1 mm Move⁽⁴⁾⁽⁹⁾	700 µsec
STABILITY
Long-Term Drift-Offset	10 µrad/12 hrs
Long-Term Drift-Offset	15 µrad/24 hrs
Long-Term Drift-Gain	10 ppm/24 hrs
Thermal Drift-Offset	20 µrad/°C
Thermal Drift-Gain	1 ppm/°C
MECHANICAL SPECIFICATIONS
Weight	5.1 kg
Material	Aluminum (Black Anodize and Blue Paint)
MTBF (Mean Time Between Failure)	20,000 hours

Notes:

All angles are optical unless otherwise specified
Without air cooling option
After initial 3-hour warm-up, ambient temperature variation < ±0.5 deg
Typical performance with f = 160mm F-Theta objective
Based on maximum rated current of the motor
Based on rated rms current of the motor with water cooling option; maximum continuous acceleration is 70% of this value without water cooling
Achievable with <1% velocity error over continuous velocity portion of move
Marking speed is dependent on allowable tracking error
Settled to within 1% of move distance
All specifications are per axis unless otherwise noted

The specifications provided on this page are for reference only. Actual product specifications are subject to the manufacturer’s latest official information.