09IAE-151510-Series

Model : 09IAE-151510-Series

Description :

• High standard quality control usage
• Up to 0.2um precision
• Full inspection process & auto analyzed functions
• Able to measure all kinds of materials
> transparent and dark samples
> high reflective and diffusive
> measuring range up to 180mm (Z axis)
Specification

Hardware Specification

XY Stage
Base 390 x 390mm 
Travel Range 150mm
Resolution up to 0.1um 
Repeatability ± 1 count, depends on encoder resolution
Z Stage
Travel Range 100 mm
Resolution ± 0.01mm
Beas Granite or Aluminum
Power 110V/220V
Scanner Type Lens Size Precision Working range Repeatability Laser spot size Cover angle
R type for Reflective 25mm 0.5um 1mm 0.06um < 5um 5deg
50mm 2um 5mm 0.1um 16um 3deg
C type for Diffusive 25mm 3um 1.8mm 0.06um 27um 150deg
50mm 6um 8mm 0.1um 37um 170deg
75mm 10um 18mm 0.3um 47um 170deg

3D ProfileMaster